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UTM-1001FW of magnetic levitation turbomolecular pump
FW turbo molecular pump with wide area and large flow exhaust performance. Turbo molecular pump is mainly used in semiconductor, film and other industrial fields.
Classification:
digital magnetic levitation type
magnetic suspension turbine floating molecular pump
Key words:
digital magnetic levitation type
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- Product features and uses
- Product parameters and graphs
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| Features
1, FH: Turbo molecular pump with high back pressure and high compression exhaust performance;
2, FW: turbo molecular pump with wide area and large flow exhaust performance.| Useis mainly used in semiconductor, thin film and other industrial fields.
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| Specification
Type UTM-350FW UTM-480FW UTM-800FW UTM-1001FW UTM-1400FW UTM-2300FW UTM-3301FW Pump body suction port VG100 / ICF152 VG150 / ICF203 VG150 / ICF203 VG200 / ICF253 VG250 /200,ICF253 VG300/250,ICF305 VG350 Intake port KF25 KF40 Exhaust velocity (L/sec) 350.0 480.0 810.0 1000.0 1490.0 2730.0 3300.0 limit pressure (n2)pa 10 negative 7 power 10 negative 8 power 10 negative 8 power maximum compression ratio >10 10 >10 9 cooling mode water cooling/air cooling water cooling mass (kg) about 17 about 28 about 36 about 60 about 90 auxiliary pump exhaust speed (L/h) 17.4 48 90 Power Supply (D3 Type) Power Supply Capacity (KVA) 0.6 0.9 1.2 1.3 2.0 Input Force Voltage/Frequency AC200-240V Single Phase 50/60Hz Mass (kg) about 10 | curve
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