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Vacuum gauge CCMT-1D
CCMT series diaphragm vacuum gauge is a vacuum gauge that uses ceramic diaphragm to deform according to the change of gas and detect pressure with the change of electrostatic capacity. Mainly used for pressure monitoring of sputtering equipment, evaporation coating equipment, solar cell equipment, etc.
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Ceramic diaphragm vacuum gauge
Aico
vacuum gauge
Ceramic diaphragm vacuum gauge
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- Product features and uses
- Product parameters and graphs
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| Features
1, Ceramic (Aluminum) Diaphragm: Superior Corrosion Resistance, Long-term Stability;
2, can measure absolute pressure: not affected by gas type, can be measured at full pressure;
3, temperature compensation: built-in temperature compensation circuit;
4, protection function: the protective structure is adopted to protect the sensor from flying objects.
5. Preheating time is shortened: the time from the power supply to the stable measurement is greatly shortened.
| Usage1, film forming process management applied to sputtering equipment, evaporation coating equipment, etc.
2, pressure monitoring applied to various manufacturing equipment such as solar cells, etc.
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| specification parameter
|# graphtype CCMT-1000D CCMT-100D CCMT-10D CCMT-1D measuring pressure range 133 KPa F.S 13.3 KPa F.S 1.33 KPa f.S 133 Pa F.S Practical Measurement Lower Limit Pressure 13 Pa 1.3 Pa 0.13 Pa 1.3 × 10 -2 Pa Decomposition Energy 66.6 Pa 6.7 Pa 0.67 Pa 6.7 × 10 -1 Pa Measurement Accuracy ±0.2% Measurement Value Output Linear Output (DC 0~10V) Power Supply Voltage DC14-30V Joint Specification NW16, 1/2 pipe( )12.7, 8VCR overall dimensions mm 55 × 117 107remarks 101
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