Products
Ceramic bearing type scroll molecular pump UTM300B
The composite airfoil turbomolecular pump with ceramic bearings can save space through the integrated design of the controller and the pump body. Excellent high back pressure characteristics, so that the auxiliary pump can also be miniaturized. Turbo molecular pump is mainly used in semiconductor, film and other industrial fields.
Classification:
Ceramic bearing type
mechanical turbomolecular pump
Key words:
Ceramic bearing type
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
adopts a composite airfoil turbomolecular pump with ceramic bearings. Through the integrated design of the controller and the pump body, space can be saved. Excellent high back pressure characteristics, so that the auxiliary pump can also be miniaturized.
| Useis mainly used in semiconductor, thin film and other industrial fields.
-
| specification parameter
|type UTM-300B pump body suction port VG100,ICF152,ISO100-K Exhaust Port KF25 Exhaust Speed (L/sec) 280.0 Limit Pressure (n2)pa Before Baking (* 3) 10 to the negative 8th power 10 to the negative 6th power compression ratio >1 × 10 9 cooling method natural air cooling/forced air cooling mass (kg) about 6-9.3 auxiliary pump exhaust speed (L/h) 7.2 above power supply (D3 type) power supply capacity (KVA) DC24V-180W input force voltage/frequency Curve
Related Products
