Products
cryopump CRYO-U4H
The CRYO-U series is a series of cryopumps capable of producing high vacuum using a two-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
Classification:
Aico
Vacuum pump
cryogenic pump
Afa low temperature pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1. Cryogenic pump is a pump that condenses and adsorbs gas molecules in a vacuum container to remove them from the vacuum environment by forming a very low temperature surface in the vacuum container.
2, when the saturated steam of the condensed gas and the adsorption equilibrium pressure of the adsorbed gas drop below 10-8pa, the cryopump can effectively pump gas.
3. This is a cryopump series that can produce high vacuum using a 2-stage GM refrigerator.
| UsesUsed in applications such as semiconductors, electronics, optics, and research and development.
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| Specification Parameter
Type CRYO-U4H CRYO-U6H CRYO-U8H CRYO-U10H Exhaust Rate @ 20 ℃ L/s argon 450.0 750.0 1700.0 2400.0 Hydrogen 500.0 1100.0 2700.0 3600.0 Argon 370.0 620.0 1400.0 2000.0 Water 1100.0 2100.0 4000.0 6900.0 Limit Pressure Pa 10 Negative 7th Power Flow Pa L/s Argon 1.3 × 10 3 1.1 × 10 3 1.2 × 10 3 1.3 × 10 3 hydrogen 1.1 × 10 2 2.4 × 10 2 1.5 × 10 2 exhaust capacity argon 1.0 × 10 7 5.6 × 10 7 1.0 × 10 8 1.0 × 10 8 hydrogen 1.5 × 10 5 3.1 × 10 5 1.0 × 10 6 1.2 × 10 6 suction flange ISO-K DN100 UVG-150,UFC-203 UVG-200,6 B ANSIUFC-253 UVG-250 Cooling Fall Time 50/60Hz 45/40 80/70 100/90 110/100 Quality KG 14.5 19 20.8 29 # Graph
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