Products
cryopump CRYO-U22WB
The CRYO-U series is a series of cryopumps capable of producing high vacuum using a two-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
Classification:
Aico
Vacuum pump
cryogenic pump
Afa low temperature pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1. Cryogenic pump is a pump that condenses and adsorbs gas molecules in a vacuum container to remove them from the vacuum environment by forming a very low temperature surface in the vacuum container.
2, when the saturated steam of the condensed gas and the adsorption equilibrium pressure of the adsorbed gas drop below 10-8pa, the cryopump can effectively pump gas.
3. This is a cryopump series that can produce high vacuum using a 2-stage GM refrigerator.
| UsesUsed in applications such as semiconductors, electronics, optics, and research and development.
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|规格参数
型式 CRYO-U20P CRYO-U22P CRYO-U22WB CRYO-U22H CRYO-U30H 排气速度 @20℃ L/s 氩 10000.0 11500.0 13000.0 17000.0 28000 氢 18000.0 14000.0 16500.0 25000.0 43000 氩 8400.0 9700.0 11000.0 14000.0 23000 水 29000.0 39000.0 39000.0 39000.0 70000 极限压力 Pa 10的负7次方 流量 Pa L/s 氩 1.1×103 1.7×103 3.5×103 4.1×103 2.7×103 氢 5.0×102 5.0×102 1.3×103 1.3×103 7.4×102 排气容量 氩 5.8×108 5.8×108 8.1×108 8.1×108 7.8×108 氢 4.6×106 6.0×106 8.5×106 8.5×106 1.5×107 吸气法兰 UVG-500 UVG-550 冷却下降时间 分 50/60Hz 180/160 180/170 165/150 150/135 240/200 质量 KG 69 115 125 175 |曲线图型式 CRYO-U12H CRYO-U12HSP CRYO-U16 CRYO-U16P CRYO-U20H 排气速度 @20℃ L/s 氩 4000.0 4100.0 5000.0 10000 氢 6000.0 6000.0 10000.0 18000 氩 3300.0 3400.0 4200.0 8400 水 9500.0 9500.0 16000.0 29000 极限压力 Pa 10的负7次方 流量 Pa L/s 氩 2.0×103 2.0×103 1.4×103 1.6×103 1.7×103 氢 4.1×102 4.1×102 4.1×102 4.5×102 5.0×102 排气容量 氩 2.1×108 4.4×108 4.3×108 4.3×108 5.8×108 氢 9.8×105 1.6×106 2.4×106 2.4×106 4.6×106 吸气法兰 UVG-300,10BANSI UVG-300,10BANSI UVG-400 UVG-500,20BANSI ISO-500 冷却下降时间 分 50/60Hz 85/75 90/80 110/100 120/110 160/140 质量 KG 40 42 61 72 型式 CRYO-U20P CRYO-U22P CRYO-U22WB CRYO-U22H CRYO-U30H 排气速度 @20℃ L/s 氩 10000.0 11500.0 13000.0 17000.0 28000 氢 18000.0 14000.0 16500.0 25000.0 43000 氩 8400.0 9700.0 11000.0 14000.0 23000 水 29000.0 39000.0 39000.0 39000.0 70000 极限压力 Pa 10的负7次方 流量 Pa L/s 氩 1.1×103 1.7×103 3.5×103 4.1×103 2.7×103 氢 5.0×102 5.0×102 1.3×103 1.3×103 7.4×102 排气容量 氩 5.8×108 5.8×108 8.1×108 8.1×108 7.8×108 氢 4.6×106 6.0×106 8.5×106 8.5×106 1.5×107 吸气法兰 UVG-500 UVG-550 冷却下降时间 分 50/60Hz 180/160 180/170 165/150 150/135 240/200 质量 KG 69 115 125 175
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