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Cryogenic cold trap CRYO-TS series
The CRYO-T series is a series of cryopumps capable of producing high vacuum for the purpose of eliminating moisture using a one-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
Classification:
Aico
Vacuum pump
Alfa low temperature cold trap
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
CRYO-T series is a cryopump series that uses a 1-stage GM refrigerator to eliminate moisture and can produce high vacuum. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
| UsesUsed in applications such as semiconductors, electronics, optics, research and development.
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| Specification Parameter
Type CRYO-U4H CRYO-U6H CRYO-U8H CRYO-U10H Exhaust Speed @ 20 ℃ L/s Argon Hydrogen Argon Water ultimate pressure Pa flow Pa L/s argon Hydrogen Exhaust Capacity Argon Hydrogen Suction Flange Cooling Drop Time Points Quality KG | Curve
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