Products
Screw pump MS1200A
The MS series is a screw type dry vacuum pump. On the basis of the traditional LS series, the corrosion resistance and powder discharge performance are improved. This model is designed for processes that use corrosive gases and have powder emissions.
Classification:
Aico
Vacuum pump
Dry vacuum pump
screw vacuum pump
MS Series
screw dry pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1. The main components such as the rotor shaft and cylinder are specially coated to prevent corrosion;
2. The rotor shaft with unique design of ULVAC is adopted to realize high-performance powder discharge;
3. From atmospheric pressure to ultimate pressure, it can operate continuously in the full pressure area.
| Purpose1, vacuum exhaust system related to semiconductor and electronic device manufacturing equipment, such as etching equipment, degluing equipment, plasma cleaning equipment, etc.;
2, vacuum exhaust system of vacuum heat treatment furnace, such as sintering furnace, carburizing furnace, etc.;
3, vacuum exhaust system of lithium battery manufacturing equipment, such as electrode drying equipment, defoaming equipment, liquid injection equipment, etc.;
4, medical food equipment related vacuum exhaust system, such as freeze drying equipment, vacuum drying equipment, etc.
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| specification parameter
type MS-120A MS-600A MS-1200A exhaust velocity m 3 /h 115.0 560.0 980.0 Limit pressure Pa ≦ 0.6 ≦ 0.1 Motor voltage V 200V :3Phase, 50/60Hz, AC200-240V ± 10% or;400V :3Phase, 50/60Hz, AC380-480V 10% rated power kW 2.4 3.1 cooling water quantity L/min 4.0 gas purge SLM Noise Value dB(A) 61 62 64 Inlet KF50 / VG50 ISO-F-80 ISO-F-100 Exhaust KF40 Weight kg 139 241 264 Size mm Remarks | Exhaust Curve
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