Products
Screw pump HR60
HR series screw dry pump is a pump that discharges the rising exhaust substances produced in CVD, etching and other processes in the state of gas through the homogenization of the pump body in the high temperature field.
Classification:
Aico
Vacuum pump
Dry vacuum pump
screw vacuum pump
HR Series
screw dry pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, Heat equalization in high temperature areas to discharge the rising exhaust materials generated in CVD, etching and other processes in a gas state; UR series can be higher than HR series;
, helium seal forms a closed structure by carrying a shielded motor, which is very safe;
3, instantaneous stop countermeasure adopted instantaneous stop countermeasure within 1000msec;
4, excellent corrosion resistance The main components are all treated with special surface treatment with high surface hardness and high corrosion resistance. Reduce the corrosion inside the pump when the corrosive gas is exhausted;
5. The communication function can read the data related to the pump operation state and the warning/alarm history. If special software is used for computer communication, centralized monitoring can be realized.
| Usage1, CVD device;
2, etching device;
3, ashing device;
4, ALD, ALH, etc.
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| Specification Parameters
Type HR60 HR90 HR300 HR600 HR1200 Use Pump HR60 HR90 HR60 HR90 HR90 Mechanical booster pump PRC-003A PRC-006A PRC-012A Maximum exhaust velocity 50hz m 3 /h 62.0 112.0 359.0 653.0 1012.0 60hz m /h 80.0 126.0 365.0 701.0 1051.0 ultimate pressure Pa 5.0 0.7 Motor Voltage V 200-220 Rated Power kW cooling water volume L/min >5.0 gas purge SLM 0~45 noise value dB(A) Inlet VG50(KF50) VG80(KF50) VG80(KF80) VG100(KF100) Exhaust KF40 Weight kg Size mm Remarks | Exhaust Curve
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