Products
Gas Analyzer CGM-052
CGM series analyzers are suitable for process management (quality management, efficiency improvement) of sputtering equipment.
Classification:
Aico
gas analyzer
sputtering process
gas analyzer
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| FEATURES
1. Process monitoring for various sputtering systems
2. Air Leak monitoring
3. Residual moisture management
4. No need for differential exhaust system (less than 1 Pa at 7.5 x 10-3Torr/1 x 10-2 mbar)
5. Built-in display: no PC is required for separate operation and use of
6, high sensitivity leak test (CGM2-052)
7, full pressure measurement
8, simple operation-One Click function
9, standard Qulee QCS software
10, support CE standard| usage1, suitable for residual gas analysis, process monitoring and impurity management of sputtering equipment (H2O).
2. Leak test for sputtering equipment. -
| Specification Parameter
Type CGM2-051 CGM2-052 CGM2-101 CGM2-102 Mass Number Range 1~50 amu 1~100 amu 1~50 amu 1~100 amu inspiration 0.1uA/Pa 0.1mA/Pa detection partial pressure 1x 10 -7 Pa 1x 10 -10 Pa uses pressure 2Pa Pa(FC)1x 10 -2 Pa(SEM) linear 1Pa full pressure measurement function has one-key leak detection function has power supply voltage DC24V 10% 50W baking possible temperature
(when sensor unit is connected)120 ℃ baking possible temperature
(when sensor unit is removed)250 ℃ use temperature range 10~40 ℃ Interface Ethernet Software Qulee QCS Ver. 4.2 to Drop (Windows 8/10/11) Applicable to Remarks | Curve
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