Products
Gas Analyzer RGM2-202
RGM series analyzers are suitable for process management (quality management, efficiency improvement) and endpoint monitoring of etching equipment and CVD equipment.
Classification:
Aico
gas analyzer
CVD-ALD-etch process
gas analyzer
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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RGM series CVD equipment etching process
| features1, stable measurement for a long time during the reaction process
2, Claude ion source
3 with magnetic field, soft ionization can prevent decomposition and adsorption caused by thermal reaction in high sensitivity ionization chamber, at the same time, the gas dissociation is less
4, the compact flow control valve
5, the distance from the treatment chamber to the ion source is very short, the resolution of
6 can be quickly responded, the pressure of a wide range of 10-6 to 13kPa (caliber optional)
7 can be measured, the function of
8 and One Click can be measured without a computer (easy for everyone, no complicated operation is required)
9. When connecting the sensor unit, the maximum temperature of 120 ℃ can be baked
10. The ion source and the preventive maintenance analysis tube of the secondary electron multiplier tube are loaded with traceability (patent application)
11. Helium leak detection can be carried out, air Leakage Test
12, Standard Onboard Software (Windows 8/10/11)
| Usage1, CVD/ALD/Etching Equipment
2, Reactive Gas
in Monitoring Process, End Monitoring
4 of Etching and Cleaning Process, Residual Gas Measurement
5, Leak Detection
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| specification parameter
type RGM2-202 RGM2-302 mass number range 1-200 amu 1-300 amu inspiration degree 1 × 10 -3 A/Pa (secondary electron doubling tube (SEM)) detects partial pressure 1 × 10 -10 Pa sampling pressure 13 KPa resolution M/M = 1M(10% p. h.) gas inlet valve flow path control valve with aperture ion source/filament sealed ion source with magnet/v-shaped filament Ir / Y 2 O 3 (1 copy) Software Qulee QCS Ver. 3.1 to drop (Windows 7/8/10) apply remarks | graph
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