Products
Process power DCS0052B
DC-2 and DC-4 are DC power supplies for sputtering of 2kW and 4kW output power. Reproducibility through high control accuracy and high quality process.
Classification:
Aico
Process power
DC power supply
Small capacity DC power supply
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, High Control Precision
Even in a low power area of 10% or less, it can realize a high precision output2 with a set value of ± 1%, a wide power precision guarantee
1~100, a wide power precision guarantee3, a light weight, a space-saving design, installation is more convenient
4, does not need cooling waterforced air cooling system, does not need cooling water.
5, high reliabilityas the cumulative result of equipment manufacturer's experience.
|UseR & Bias Power Supply for Sputtering Equipment and Various Film Forming Equipment -
| specification parameter
type DC-2 DC- 4 DCS0052B input force style input force voltage 3 phase AC180 ~ 242V Single Phase AC95 ~121V/AC190 ~242V Power Capacity 3.5KVA Below 6.2KVA Below 1KVA Output Style Maximum Rated Output 2KW 4KW 500W rated current 5A 10A 1.25A rated voltage -800V ignition voltage -1200V abnormal discharge control when abnormal discharge is detected, the inverter stops control control mode constant output control (P control) / constant current control (I control) / constant voltage control (V control) control accuracy set value ±1% ~2% control guarantee range rated output value 1 ~100% rated output value 10% ~100% external Control Analog/Digital , RS-232C or 485 Cooling Method Forced Air Cooling Mass (Kg) 15 9 Overall Dimension W×D×H ( mm ) 241 × 610 × 133 (excluding protrusions) 240 × 450 × 99 (excluding protrusions) Remarks | Curve
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