Products
Process power DC-10-D
DC-10-D and DC-20-D were DC power supplies for sputtering, and the output power was 10kW and 20kW. It is composed of reliable components and circuits. It is a very reliable power supply suitable for plasma loads, reflecting the technical know-how accumulated by Afa Ke in power supply design over the years. Features
Classification:
Process power
DC pulse power supply
Aico
Power
Key words:
Process power
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- Product features and uses
- Product parameters and graphs
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| Features
1, Abundant High Performance Options
2, Lightweight and Space-Saving Design
3, Voltage Output Range of 800V and 1000V
4, Output Control for Plasma
5, Forced Air Cooling System, no cooling water
6, excellent ARC function and high-speed ARC circuit breaker
7, up to 12 devices operating in parallel (240kW)
8, RoHS, CE, SEMI-F47 standard
| application1, FPD sputtering equipment
2, semiconductor sputtering equipment
3. Electronic components sputtering equipment
4. Industrial coating sputtering equipment
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| Specification Parameter
|Type DC-10-D DC-10-DH DC-20-D DC-20-DH Input Force Style Input Voltage AC208V Input Capacity 13.5KVA Below 25kVA Below Output Style Maximum Rated Output 10kW 20kW Rated Current 25A 18A 50A 40A rated voltage 800V 1000V 800V 1000V ignition voltage -1500V abnormal discharge control when abnormal discharge is detected, shutdown by inverter stop or high-speed arc shutdown circuit * 1 control control mode control / user control / serial communication control (RS232C or RS485 ) /EtherCAT * 4 control accuracy rated power 1 to 10% : ±5% or less of the set value
119 10-100% of the rated power : ±0.5% or less of the rated output or ±1% of the set value highercontrol guarantee range Constant power control: 10 to 100% of the rated power value (option: 1-100% ) cooling mode forced air cooling mass (Kg) 29 36 overall dimensions W×D×H ( mm ) 483 × 630 × 133(excluding protrusions) Remarks Curve
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