Products
Process power DC-5P
The DC-P series is an effective power supply for arcs generated in reactive processes. Due to the set periodic inversion output voltage, the charge accumulated on the surface of the target is neutralized, and the yield and productivity are improved.
Classification:
Aico
Process power
DC pulse power supply
Power
Key words:
Aico
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, High Yield
Higher Power Can Be Input by Reducing Abnormal Discharge2, Substrate Damage Reduction
Can Reduce Substrate Damage Caused by Arc3, Variable Reverse Pulse Frequency
Can Be Used in the Range of 10kHz to 250kHz4, Master/Slaf Connection Allows Large Capacity
Up to 6 after the parallel operation (the same model can be used)5, DC output can also be
PULSE function is stopped, it can also be used as a DC power supply with extremely low arc performance using| application, FPD reactive sputtering equipment
2, industrial coating reactive sputtering equipment
3, color TFT reactive sputtering equipment
-
| Specification Parameter
Type DC-2 DC-4 DC-5P DC-10P Input Force Style Input Voltage 3 Phase AC180 ~242V Three Phase AC187 ~229V Input Capacity 3.5KVA Below 6.2KVA Below 8kVA 13.5kVA Output Style Max rated output 2kw 4kw 5kw 10kw Rated current 5A 10A 12.5A 25A Rated voltage -800v -650v / -800v Ignition Voltage -1200V -1500V Abnormal Discharge Control When Abnormal Discharge is Detected Inverter Stops Control Control Mode Constant Power Control (P Control)/Constant Current Control (I Control)/Constant Voltage Control (V Control) control accuracy ±1 % rated output ±0.5 or 1% of the set value, the maximum value shall prevail control guarantee range 1 to 100% 10 to 100 of rated power cooling mode forced air cooling mass (Kg) 15 29 36 overall dimensions W×D×H ( mm ) 241 × 610 × 133 (excluding protrusions) 483 × 630 × 133 (excluding protrusions) remarks | Curve
Related Products
