Products
Process power DC-20-H-AM
DC-10 and DC-20 are DC power supplies for sputtering of 10kW and 20kW output power. It consists of reliable components and circuits. It is a reliable power supply for plasma loads, and its design reflects years of accumulated expertise including power supply applications.
Classification:
Process power
DC pulse power supply
Aico
Power
Key words:
Process power
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, Lightweight Space-saving
Lightweight Space-saving Design, Easy Installation2, Optional Output Voltage Range
In addition to 800V Specification, 1000V Specification is also provided.3, Rich Arc Handling
Rich Arc Control System.4, no cooling water
forced air cooling system, no cooling water.5, can be installed high speed arc interrupt loop
to achieve standard low arc energy. In addition, an optional high-speed arc interruption circuit can be installed.6. Free parallel operation function
DC-10,DC-20: The optional parallel operation function allows free combination of 10kW and 20kW, and parallel operation of up to 12 units. (high up to 240 kW)| application1, FPD sputtering equipment
2, semiconductor sputtering equipment
3, touch screen sputtering equipment
4, industrial coating sputtering equipment
-
| Specification Parameter
Type DC-10-AM DC-10-H-AM DC-10-4-AM DC-20-AM DC-20-H-AM DC-20-4-AM Input Force style Input Voltage 3 Phase AC187 ~229V 3 Phase AC342 ~440V 3 Phase AC187 ~229V 3 Phase AC342 ~440V input capacity 13.5KVA below 25KVA below output style maximum rated output 10kW 20kW rated current 25A 18A 25A 50A 40A 50A Rated Voltage -800V -1000V -800V -800V -1000V -800V Ignition Voltage -1500V Abnormal Discharge Control when detects abnormal discharge, the inverter stops control control mode constant power control (P control)/constant current control (I control)/constant voltage control (V control) control precision constant power control (P control): ± 0.5% or less of the rated output or ± 1% of the set value, whichever is greater.
Constant current control (I control): ± 1% or less of the rated output or ± 2% of the set value, whichever is greater.
Constant voltage control (V control): ± 1% or less of the rated output or ± 2% of the set value, whichever is greater.control guarantee range constant power control, 10 to 100% of rated power cooling mode forced air cooling mass (Kg) 29 36 overall dimensions W×D×H ( mm ) 483 × 630 × 133 (excluding protrusions) remarks | graph
Related Products
