Products
Process power MFU-20K
The MFU-20K is a unit that converts a direct current output into a bipolar pulse output by combining with a ULVAC-made DC power supply. Achieve yield and yield improvement at low cost.
Classification:
Aico
Process power
MF intermediate frequency power supply
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, Wide Frequency Range
Can ※ 12 in the range of 10kHz ~ 100kHz, Master/Sligf Connection Allows Large Capacity
Up to 6 Parallel Operations3, DC Output
Input DC Power Output Can Be Applied to Cathode ※ 2as It Is | Application1, Reactive Sputtering Equipment for FPD
2, Reactive Sputtering Equipment for Industrial Coating
3, Reactive Sputtering Equipment for Color TFT
4, General Sputtering Equipment
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| Specification Parameter
Type MFU-20K Control Power Input Force Input Voltage Single Phase AC90 ~264V Input Force Capacity 400VA input force specification operating voltage 0 ~-1000V maximum operating current 50A ignition voltage -1200V output specification maximum output voltage 1000V ( RMS ) ignition voltage DC-1200V maximum output current 50A cooling mode forced air cooling mass (Kg) 29 Overall Dimension W×D×H ( mm ) 483 × 630 × 177 (excluding protrusions) Remarks | Curve
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