Products
Process power RMG-1303
The RMG-1303 is a 13.56MHz,300W power matcher integrated RF power supply suitable for RF sputtering, CVD, etching, etc., plasma processes. Matcher and RF power supply integration design, small size, light weight. Suitable for a wide range of fields from research and development equipment to mass production equipment.
Classification:
Aico
Process power
RF power supply
RF power matcher all-in-one machine
Power
Key words:
Aico
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, Can be controlled by low output power
|
2, Can be controlled by low output power of 1W
3, Standard equipped with pulse RF output function
4, Standard equipped with pulse RF output function of 500Hz ~ 100KHz, can be controlled at low power
5, standard external synchronization terminal
6, standard carrying terminal (BNC terminal), input and output
7 of 13.56MHz synchronous signal for superposition operation, wide input
of AC100V to AC220V, wide input
8 of single phase 100V to 220V / 50Hz to 60Hz, small and light power supply
200mm × 200mm × 350mm/10Kg, support various specifications
RoHS,CE,KC,SEMI-F47 CompatibleUsage1, Sputtering Equipment2, CVD Equipment
3, Plasma Cleaning Equipment
4, Plasma Etching Equipment
5, Plasma Degluing Equipment
6, RF Ion Source
7, RF Neutralizer
-
| specification parameter
power supply function part
type RMG-1303 rated input voltage single phase 50/60hz AC100V ~ 220V rated input capacity 700VA Leakage Current Below 5mA Input Interface IEC60320-C14 Oscillation Frequency 13.56MHz 0.01% * 1 Rated Travel Wave Power 300W (at 50Ω Load) Rated Reflected Wave Power 80W power stability ±1% or larger value within 2W (50Ω load) cooling mode fan forced air cooling remarks can output 500Hz ~ 100KHz pulse RF Matcher Function Part
Type RMG-1303 Rated Power 300W Rated Current 10Arms Rated Voltage 2500Vpp/2500Vdc (standard) * 2 output electrode 2-M4 (standard) nhnDIN7/16*3 matching accuracy VSWR1.2 or below 3W remarks can optionally change rated voltage select to change to connector output type | curve
Related Products
