Products
Process Power Supply MBX-Series
MBX series is a special matching box belonging to RFS series
Classification:
Aico
Process power
RF power supply
Matcher
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, high efficiency equipped with high power conversion efficiency RF circuit to save energy.
2, fast automatic matching fast algorithm to achieve fast automatic matching.
3. RF power supply has built-in automatic matching function. Only the host can control the matching system.
4. The RF power supply and matcher
5 can be manually controlled by the built-in controller. The external analog control can be flexibly controlled to realize serial communication control.
6, high reliability on the design experience accumulated as equipment manufacturers.
| Application1, Sputtering Equipment
2, CVD Equipment
3, Plasma Etching Equipment
4, RF Ion Source
5, Neutralizer
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parameter
type MBX-1305N MBX-1310N MBX-1330N MBX-1350N allowable input power 30~500W 30 ~ 1KW ~ 3KW 50 ~ 5KW allowable output current 30A 80A 120A allowable output voltage 2.5KV pp 5KV pp 10KV pp cooling mode forced air cooling water cooling (2L/min) mass (Kg) 8 10 21 overall dimensions W×D×H ( mm ) 375 × 250 × 120 (excluding protrusions) 375*250 × 170 (excluding protrusions) 450 × 500 × 248 (excluding protrusions) Remarks
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