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Mechanical turbomolecular pump nEXT240
A turbomolecular pump is a multi-stage axial-flow turbine in which high-speed rotating blades achieve compression by increasing the possibility of gas movement in the pumping direction. The turbomolecular pump is optimized for molecular flow conditions and requires an appropriately sized backing pump to exhaust to the atmosphere.
Classification:
NEXT mechanical turbomolecular pump
mechanical turbomolecular pump
Key words:
NEXT mechanical turbomolecular pump
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- Product features and uses
- Product parameters and graphs
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| Features
1, the selection range of turbo molecular pumps, turbo molecular pumps with pumping speeds of 47 to 400Ls -1 and inlet flanges of DN40 to DN16.
2. Integrated control, molecular pump and vacuum gauge integrated controller can realize complete control of the pump and up to 3 vacuum gauges, and can realize complete serial remote communication.
3. Exhaust valve option, optional turbo molecular pump exhaust valve can be ordered as part of the pump truck assembly.
4. User-maintainable, all nEXT scroll molecular pumps and pre-pumps can be completely repaired by users.
5. Sturdy metal frame, all-metal frame with locking casters. Sturdy and easy-to-move system design, including safe desktop operation workbench installation kit.
6, front pump selection, front pump can choose 1m -3h -1 pumping speed oil seal rotary vane pump or dry pump.
7, low vibration, the backup pump is installed on the anti-vibration base, which can effectively reduce the impact of the pre-pump vibration on the trolley.
| PurposeIn addition to responding to the general R & D market (sometimes requiring faster pumping speeds), these pumps are also designed to meet the requirements of the coating market and other diffusion market areas, such as Heat treatment, furnace applications, electron beam welding, etching, ion implantation, venting and cylinder evacuation.
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| specification parameter
type nEXT85 DN40 nEXT85 DN63 nEXT240 nEXT300 nEXT400 peak pumping speed Ls -1 N 2 47.0 84.0 240.0 300.0 400.0 Ar 44.0 80.0 230.0 280.0 380.0 He 61.0 78.0 340.0 340.0 290.0 H 2 49/44(D/H) 60/54(D/H) 280.0 280.0 325.0 Compression ratio N 2 >10 11 >10 11 (D & T) Ar He 8 × 10 6 / 2 × 10 7 (D/H) 3 × 10 5 / 10 6 (D/T) 10 6 / 3 × 10 6 (D/T) 10 8 / >10 8 (D/T) H 2 2 × 10 5 / 5 × 10 5 (D/H) 10 4 / 10 5 (D/T) 5 × 10 4 / 10 5 (D/T) 5 × 10 5 / 10 6 (D/T) Limit Vacuum (CF) mbar <5 × 10 -10 Maximum Allowable Pre-stage Pressure mbar 18 9.5 / 20 (D/T) Motor Maximum Power Consumption W 80 (range 50-120) 160 (range 50-200) motor operating voltage V (DC) 24 - 48 motor rated revolutions rpm 9000 6000 inlet flange NW40 ISO63 / CF63 ISO100 / CF100 ISO160 / CF160 Exhaust Flange NW16 NW25 Start to Full Speed Time s 115 175 cooling mode natural cooling/forced air cooling/water cooling controller communication interface RS232, 485 / I /O Quality kg 3 3 or 4.5 6 or 9 7 or 10 Remarks | specifications
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