Products
Screw pump NRL60A
The NRL series is heated in the low temperature field. In addition to the PVD process, it is especially suitable for the exhaust of important process cavities where it is desired to increase the flow rate and shorten the exhaust time. Low noise, low vibration, excellent corrosion resistance. Mainly used in etching, sputtering coating, single crystal furnace, freeze drying and other industries.
Classification:
Vacuum pump
Dry vacuum pump
screw vacuum pump
NRL Series
screw dry pump
Aico
Key words:
Vacuum pump
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- Product features and uses
- Product parameters and graphs
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| Features
1, NRL Series Homogenization in Low Temperature Fields. In addition to PVD process, it is especially suitable for the exhaust of important process cavities that want to increase the flow rate and shorten the exhaust time;
2, low noise, low vibration, excellent corrosion resistance;
3, standard The parts adopt high hardness and undergo excellent anti-corrosion special surface treatment to reduce the corrosion degree inside the pump body when the corrosive gas is exhausted;
4, optional silencer, cooling water flow switch, nitrogen flow switch, pump temperature sensor.
| Uses1, Active Gas (CVD, Etching, etc.);
2, exhaust inactive gas (sputter coating, vapor coating, heat treatment, liquid crystal injection, etc.);
3, exhaust gas used in dust generation process (Si single crystal furnace, etc.);
4, used as a pre-pump (turbo molecular pump, mechanical Roots pump pre-pump);
5, freeze-drying and other steam exhaust.
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| Specification Parameters
Type NRL60A NRL90A NLR180A Exhaust Velocity m 3 /h 50hz 70.0 116.0 200.0 m /h 60hz 84.0 140 240 limit pressure Pa 5.0 motor voltage V rated power kW 2 cooling water quantity L/min 5 gas purge SLM Noise Value dB(A) Inlet VG50 VG80 VG80 Exhaust Port NW40 Weight kg 128 188 268 Size mm Remarks | Exhaust Curve
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