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Cryogenic cold trap CRYO-T series

The CRYO-T series is a series of cryopumps capable of producing high vacuum for the purpose of eliminating moisture using a one-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.

Classification:

Aico

Vacuum pump

cryogenic cold trap

Alfa low temperature cold trap

Key words:

Aico


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  • Product features and uses
  • Product parameters and graphs
  • | Features

    CRYO-T series is a cryopump series that uses a 1-stage GM refrigerator to eliminate moisture and can produce high vacuum. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.

    | Use

    Use in semiconductor, electronic machinery and equipment, optics, scientific research and other fields

  • | Specification Parameter

    Type CRYO-U4H CRYO-U6H CRYO-U8H CRYO-U10H
    Exhaust Speed @ 20 L/s Argon
    Hydrogen
    Argon
    Water
    ultimate pressure Pa
    flow Pa L/s argon
    Hydrogen
    Exhaust Capacity Argon
    Hydrogen
    Suction Flange
    Cooling Drop Time Points
    Quality KG

    | Graph

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