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Magnetic levitation turbomolecular pump STP1003 DN200

The STP series maglev turbomolecular pumps enjoy a high reputation in the market for their quality and reliability, and are molecular pumps for many challenging semiconductor applications. For laboratory applications, STP magnetically levitated turbomolecular pumps are extremely reliable and run for extremely long periods of time without maintenance.

Classification:

STP Maglev Turbo Molecular Pump

magnetic suspension turbine floating molecular pump

Key words:

STP Maglev Turbo Molecular Pump


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  • Product features and uses
  • Product parameters and graphs
  • | Features

    1. Low vibration, magnetic levitation means no friction, so the vibration is extremely low. In addition, this characteristic can remain unchanged and will not change with the wear of parts.

    2. Oil-free, magnetic bearings are used, so there is no need to use any hydrocarbon lubricants.

    3. Automatic balance system, Edward 5-axis magnetic levitation pump can dynamically adjust the magnetic field to prevent rotor imbalance.

    4. Maintenance-free, zero friction means no wear, so no daily maintenance is required during normal operation.

    5. Corrosion resistance. Most Edward STP magnetic levitation scroll molecular pumps also provide nickel-coated internal flow components and special corrosion-resistant models for nitrogen purge equipment, which are ideal for chemical laboratory applications.

    | Purpose

    In addition to the general R & D market (sometimes requiring faster pumping speed), these pumps are also designed to meet the requirements of the coating market and other diffusion market areas, such as heat treatment, furnace applications, electron beam welding, etching, ion implantation, venting and cylinder evacuation.

  • | Specification Parameter

    Type STP301 DN100 STP451 DN160 STP603 DN160 STP1003 DN200 STPiX457 DN100 STPiX457 DN160 STPiX3006 DN250 STPiX3006 DN320
    Peak pumping speed Ls -1 N 2 300.0 480.0 650.0 1000.0 300.0 450.0 2300.0 2700.0
    H 300.0 460.0 550.0 800.0 300.0 460.0 2600.0 2700.0
    compression ratio N 2 >10 8
    H 2 2 × 10 4 >10 5 1 × 10 4 6 × 10 4
    ultimate vacuum (CF) mbar <5 × 10 -10
    maximum processible gas flow N 2 sccm / 120 1000
    Continuous Operation Allowable Maximum Inlet Pressure mbar 6.7 × 10 -4 1.3 × 10 -4 1.3 × 10 -3 /
    Maximum Allowable Pre-stage Pressure mbar 0.13 0.67 1.33
    Motor Maximum Power Consumption W 350 800 240 1500
    Motor Rated Revolution rpm 48000 35000 55000 27000
    inlet flange ISO100 or CF100 ISO160 or CF160 ISO160 or CF160 ISO200 or CF200 ISO100 or CF100 ISO160 or CF160 ISO250 or CF250 ISO320 or CF320
    Exhaust Flange NW25 NW40 NW25 NW40
    Time from Start to 90% Acceleration s 180 360 230 840
    Cooling Mode Natural Cooling/Forced Air Cooling/Water Cooling Natural Cooling/Forced Air Cooling /
    Controller Communication Interface RS232 / I /O
    Quality kg 11 12 31kg 16 84 87
    remarks

    | graph

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