Products
Roots pump LR60
The LR series Roots dry pump is a pump that is homogenized by the pump body in the low temperature area. In addition to the PVD process, it is especially suitable for the exhaust of the important preparation and blanking chamber that needs to shorten the exhaust time in order to improve the production capacity.
Classification:
Vacuum pump
Dry vacuum pump
Multi-stage Roots-type vacuum pump
LR Series
multistage roots type dry pump
Aico
Key words:
Vacuum pump
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- Product features and uses
- Product parameters and graphs
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| Features
1, Low Temperature Area Homogenization (LR Series) Apart from PVD Process, it is especially suitable for a pump that exhausts the important material preparation and blanking chamber that needs to shorten the exhaust time in order to improve production capacity.
, helium seal is very safe by carrying a shielded motor to form a closed structure;
3, instantaneous stop countermeasure adopted instantaneous stop countermeasure within 1000msec;
4, excellent corrosion resistance The main components are all treated with special surface treatment with high surface hardness and high corrosion resistance. Reduce the corrosion inside the pump when the corrosive gas is exhausted;
5. The communication function can read the data related to the pump operation state and the warning/alarm history. If special software is used for computer communication, centralized monitoring can be realized.
| Application1, Film Forming Device (Sputtering Device/Evaporation Device, etc.);
2, shorten the exhaust time of the preparation and blanking chamber;
3, as an auxiliary exhaust pump (auxiliary exhaust of turbo molecular pump and mechanical booster pump).
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| specification parameter
type LR60 LR90 LR180 LR421 LR421-T exhaust speed m 3 /h 50hz 62.0 112.0 183.0 440.0 m/h 60 hz 80.0 126.0 237.0 ultimate pressure Pa 5.0 Motor Voltage V Three-phase: 200 VAC(50/60Hz), 220 VAC(60Hz) 3-phase: 180~240 VAC/
380~440 VAC(50/60Hz)rated power kW cooling water volume L/min 5 gas purge SLM noise value dB(A) inlet VG50(KF50) VG80(KF50) VG100 outlet KF40 VG50 Weight kg 180 245 335 415 Size Remarks | Exhaust Curve
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