Products
Vacuum Gauge SH200-A/R/E
The SH200-A/R/E vacuum gauge is a new series of sensor types "G-TRAN series compound ionization vacuum gauge", which can realize different measurement ranges. As a B- A type ionization vacuum gauge, it can measure ultra-high vacuum. It retains the previous concept of wide-width pressure measurement and low operating cost, but has been improved and more user-friendly. It is suitable for measuring electronic components and semiconductors in high vacuum areas of various manufacturing equipment.
Classification:
All products
hot cathode vacuum gauge
Aico
vacuum gauge
hot cathode vacuum gauge
Key words:
All products
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, Connectable to Different Measurement Ranges: Composite Ionization Vacuum Gauge Can Be According to;
2. Miniaturization: Compared with previous products, the size has been greatly reduced (the controller volume has been reduced by 56%), making it one of the smallest products of the same grade.
3. Improvement of operability: Through connection with PC/smart phone, set point setting, status confirmation, etc.;
4. More powerful product lineup: In addition to analog output specifications (SH200-A) and serial communication specifications (SH200-R), EtherCAT specifications (SH200-E) will also be added;
5. Filament Life notification function: By monitoring the filament power, the filament life can be notified in advance.
wide range of pressure measurement: from atmospheric pressure to high vacuum range (1 × 10+5~5 × 10-8Pa)(optional SWU10-R case);
6, can accurately measure atmospheric pressure: the opening of the cavity can be checked (when the optional unit SAU is connected)| Purpose1. Process monitoring for high vacuum areas of various manufacturing equipment, including semiconductors and electronic components;
2. Ultimate pressure measurement for high vacuum areas of various manufacturing equipment with multiple processing chambers, for example, in-line type and leaf type;
3, pressure measurement of high vacuum and ultra-high vacuum equipment.
-
| Specification
Type SH200-A SH200-R SH200-E Model Specification Standard Specification Serial Communication Specification EtherCAT Specification Adapt to multi-ion sensor SWT-16(NW16), SWT-25(NW25) Sensor Multi-ion Sensor: 1
Pirani Vacuum Gauge SWU10-R:1 (Optional)
Other Sensors SAU:1 (Optional)Measurement Accuracy (N2) SH200 Body Mode: ± 2% Sensor Internal Volume 17cm 3 (M-44), 19cm 3 (M-45), 17cm 3 (M-46) Use temperature range 10~50 ℃ Use humidity range 15 ~ 80% (no condensation) Keep temperature -20~65 ℃ (no condensation when not energized) IP protection class IP30 power supply voltage DC20 ~ 28V (ripple, noise below 1%)
8Winput/output connector D-sub15 pin (M2.6 screw) weight regulator: about 280g measuring sub (M-44, M-45):80g, (M-46): 300g overall dimensions W×D×H(mm) 69 × 63 × 90 (controller part) remarks | curve
Related Products
