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cryopump IS XVS 320F
The cryopump's superior hydrogen extraction performance increases process yield and throughput, providing an excellent solution to today's ion implantation application challenges. The cryopump's built-in intelligent system controls ensure better process quality, vacuum consistency and operating time, while providing real-time system information to optimize array temperature control. Improve vacuum quality by automatically adapting to changing heat/gas load conditions.
Classification:
Edward
cryogenic pump
Edward cryogenic pump
On-Board®XVS cryogenic pump
Key words:
Edward
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- Product features and uses
- Product parameters and graphs
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| Features
320FX:
1. The distributed control system can monitor and continuously adjust various components of the cryopump system
2, maintain high-quality system-wide vacuum performance, provide excellent process consistency
3, and have fast regeneration speed and low energy and cooling water consumption in both single-pump and multi-pump configurations, without sacrificing vacuum performance
4, easy system integration
5, rapid production installation
6, enhanced remote monitoring capabilities, preventive and predictive maintenance
320F XVS:
1, H2 pumping speed fluctuation between regeneration processes is reduced
2, the influence of photoresist contamination on H2 pumping speed is reduced
3, optimized and stable array temperature
| useprecision cryopump system for semiconductor, flat panel and optical equipment manufacturing.
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| Specification Parameters
Type 320FX 320F XVS Maximum Exhaust Velocity L/sec Argon 3800.0 2400.0 Hydrogen 15500.0 12500.0 Air 4800.0 3600.0 Water 1100.0 11000.0 Extreme Pressure Torr <1.0 × 10 -8 maximum flow L hydrogen 40 30/40 motor power VAC 200/230 suction flange ISO 320mm Quality KG 45.5 | Curve
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