Products
CRYO-U22P of cryopump (B)
The CRYO-U series is a series of cryopumps capable of producing high vacuum using a two-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
Classification:
Aico
Vacuum pump
cryogenic pump
Afa low temperature pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1. Cryogenic pump is a pump that condenses and adsorbs gas molecules in a vacuum container to remove them from the vacuum environment by forming a very low temperature surface in the vacuum container.
2, when the saturated steam of the condensed gas and the adsorption equilibrium pressure of the adsorbed gas drop below 10-8pa, the cryopump can effectively pump gas.
3. This is a cryopump series that can produce high vacuum using a 2-stage GM refrigerator.
| UsesUsed in applications such as semiconductors, electronics, optics, and research and development.
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| Specification Parameter
Type CRYO-U20P CRYO-U22P CRYO-U22WB CRYO-U22H CRYO-U30H Exhaust Speed @ 20 ℃ L/s Argon 10000.0 11500.0 13000.0 17000.0 28000 Hydrogen 18000.0 14000.0 16500.0 25000.0 43000 Argon 8400.0 9700.0 11000.0 14000.0 23000 water 29000.0 39000.0 39000.0 39000.0 70000 limit pressure Pa 10 negative 7 power flow Pa L/s argon 1.1 × 10 3 1.7 × 10 3 3.5 × 10 3 4.1 × 10 3 2.7 × 10 3 Hydrogen 5.0 × 10 2 5.0 × 10 2 1.3 × 10 3 1.3 × 10 3 7.4 × 10 2 Exhaust Capacity argon 5.8 × 10 8 5.8 × 10 8 8.1 × 10 8 8.1 × 10 8 7.8 × 10 8 hydrogen 4.6 × 10 6 6.0 × 10 6 8.5 × 10 6 8.5 × 10 6 1.5 × 10 7 suction flange UVG-500 UVG-550 cooling drop time minutes 50/60Hz 180/160 180/170 165/150 150/135 240/200 mass KG 69 115 125 175 | Curve
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