Products
cryopump CRYO-U20H
The CRYO-U series is a series of cryopumps capable of producing high vacuum using a two-stage GM refrigerator. Depending on the application areas of FPD, semiconductors, electronics, optics, research and development, there is a wide range of product lineups from small to large for you to choose from.
Classification:
Aico
Vacuum pump
cryogenic pump
Afa low temperature pump
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1. Cryogenic pump is a pump that condenses and adsorbs gas molecules in a vacuum container to remove them from the vacuum environment by forming a very low temperature surface in the vacuum container.
2, when the saturated steam of the condensed gas and the adsorption equilibrium pressure of the adsorbed gas drop below 10-8pa, the cryopump can effectively pump gas.
3. This is a cryopump series that can produce high vacuum using a 2-stage GM refrigerator.
| UsesUsed in applications such as semiconductors, electronics, optics, and research and development.
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| Specification Parameter
Type CRYO-U12H CRYO-U12HSP CRYO-U16 CRYO-U16P CRYO-U20H Exhaust Speed @ 20 ℃ L/s Argon 4000.0 4100.0 5000.0 10000 Hydrogen 6000.0 6000.0 10000.0 18000 Argon 3300.0 3400.0 4200.0 8400 Water 9500.0 9500.0 16000.0 29000 Limit Pressure Pa 10 Negative 7th Power Flow Pa L/s Argon 2.0 × 10 3 2.0 × 10 3 1.4 × 10 3 1.6 × 10 3 1.7 × 10 3 Hydrogen 4.1 × 10 2 4.1 × 10 2 4.1 × 10 2 4.5 × 10 2 5.0 × 10 2 Exhaust Capacity Argon 2.1 × 10 8 4.4 × 10 8 4.3 × 10 8 4.3 × 10 8 5.8 × 10 8 hydrogen 9.8 × 10 5 1.6 × 10 6 2.4 × 10 6 2.4 × 10 6 4.6 × 10 6 suction flange UVG-300,10 B ANSI UVG-300,10 B ANSI UVG-400 UVG-500,20 B ANSI ISO-500 Cooling Fall Time Points 50/60Hz 85/75 90/80 110/100 120/110 160/140 Quality KG 40 42 61 72 | Graph
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