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UTM-800FH of magnetic levitation turbomolecular pump
FH is a turbo molecular pump with high back pressure and high compression exhaust performance. Turbo molecular pump is mainly used in semiconductor, film and other industrial fields.
Classification:
digital magnetic levitation type
magnetic suspension turbine floating molecular pump
Key words:
digital magnetic levitation type
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- Product features and uses
- Product parameters and graphs
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| Features
1, FH: Turbo molecular pump with high back pressure and high compression exhaust performance;
2, FW: turbo molecular pump with wide area and large flow exhaust performance.| Useis mainly used in semiconductor, thin film and other industrial fields.
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| Specification Parameter
Type UTM-350FH UTM-480FH UTM-800FH UTM-1001FH UTM-3303FH Pump Body Intake Port VG100 / ICF152 VG150 / ICF203 VG150 / ICF203 VG200 / ICF253 VG350 suction port KF25 KF40 discharge speed (L/sec) 350.0 4810.0 860 3300.0 10 negative 8th power >10 10>10 9>10 11water cooling/air cooling about 17 about 28 about 86 17.4 48 90 Power Capacity (KVA) 0.6 0.9 1.6 AC200-240V Single Phase 50/60Hz About 10 |
Curve
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