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Process power RFS-1350N
The RFS-N series is an RF power supply for plasma process with an output frequency of 13.56MHz and a power of 0.5kW/1/kW/3kW/5kW. The high-efficiency RF amplifier is loaded to achieve small and light weight. In addition, an automatic matching controller function is built into the RF power supply, and power control and matching system control of the RF power supply can be performed only from the host unit.
Classification:
Aico
Process power
RF power supply
RF power supply
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, High Efficiency
Equipped with high power conversion efficiency RF circuit to save energy.2, fast automatic matching
fast algorithm to achieve fast automatic matching.3, RF power supply built-in automatic matching function
Only the host can control the matching system.
can be manually controlled by the built-in controller RF power supply and matcher4, flexible control
external analog control, can realize serial communication control.5. High reliability
Pair of design experience accumulated as equipment manufacturer.| Application1, Sputtering Equipment
2, CVD Equipment
3, Plasma Etching Equipment
4, RF Ion Source
5, Neuterizer
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| Specification Parameter
Type RFS-1305N RFS-1310N RFS-1330N RFS-1350N Input Force Style Input Voltage Single Phase AC180 ~242V 3 phase AC180 ~242V input capacity 1.2KVA 1.8KVA 5KVA 8KVA output style frequency 13.56 MHZ rated wave output (at 50Ω load) 500W 1KW 3KW 5KW maximum wave output 100W 500W harmonic distortion rate -35db Control Accuracy Rated Output + % Below Control Guarantee Range Rated Power Value 10 ~100% Cooling Mode Forced Air Cooling Water Cooling (4L/min) water cooling (6L/min) mass (Kg) 11 23 overall dimensions W×D×H ( mm ) 240 × 495 × 150 (excluding protrusions) 480 × 495 × 150 (excluding protrusions) Remarks | Curve
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