Products
Process power A2K-20K
The A2K series is an additional unit that pulses a positive voltage on the DC power output in a reactive sputtering process to neutralize the accumulated charge on the target to prevent abnormal discharge. It can be simply added to the original power supply, and the yield and yield can be improved at low cost.
Classification:
Aico
Process power
DC power supply
Abnormal discharge prevention unit
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, High Yield
Higher power can be input by reducing abnormal discharge2, substrate damage reduction
can reduce substrate damage caused by arc3, control substrate problem
Compared with RF sputtering, can reduce substrate temperature4, simple connectivity
can be connected to existing equipment5, variable reverse pulse frequency
A2KH-25/50:1kHz ~ 20kHz, A2K-20K/40K:6 can be used in the range of 1kHz to 50kHz, pulse synchronization system
can output synchronization pulses * 2*37 of multiple A2K units, master-slave connection can realize large capacity
A2K-20K, 40K up to 6 parallel operation| application1, FPD reactive sputtering equipment
2. Reactive sputtering equipment for industrial coating
3. Reactive sputtering equipment for color TFT
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| Specification Parameter
Type A2KH-25 A2K-20K A2K-40K Control Power Input Force Specification Input Voltage Single Phase AC90 ~ 110V single phase AC90 ~ 264V input force capacity 100AV 400AV input force specification action voltage -800v action current 25A 50A 100A Input Structure MS3106B 22-2P General Interface 1 System General Interface 2 System Cooling Method Forced Air Cooling Mass (Kg) 16 30 45 overall dimensions W×D×H ( mm ) 238 × 450 × 149 (excluding protrusions) 483 × 630 × 177 (excluding protrusions) remarks | Curve
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