Products
Process power DC-4
DC-2 and DC-4 are DC power supplies for sputtering of 2kW and 4kW output power. Reproducibility through high control accuracy and high quality process.
Classification:
Aico
Process power
DC power supply
Small capacity DC power supply
Power
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, High Control Precision
Even in a low power area of 10% or less, it can realize a high precision output2 with a set value of ± 1%, a wide power precision guarantee
1~100, a wide power precision guarantee3, a light weight, a space-saving design, installation is more convenient
4, does not need cooling waterforced air cooling system, does not need cooling water.
5, high reliabilityas the cumulative result of equipment manufacturer's experience.
|PurposeR & Bias Power Supply for Sputtering Equipment and Various Film Forming Equipment -
| Specification Parameter
Type DC-2 DC-4 DC-5P DC-10P Input Force Style Input Voltage 3 phase AC180 ~242V Three Phase AC187 ~229V Input Capacity 3.5KVA Below 6.2KVA Below 8kVA 13.5kVA Output Style Maximum Rated Output 2kw 4kw 5kw 10kw rated current 5A 10A 12.5A 25A rated voltage -800v -650v / -800v ignition voltage -1200V -1500V abnormal discharge control when abnormal discharge is detected, inverter stops control control mode constant power control (P control)/constant current control (I control)/constant voltage control (V control) control accuracy ±1 % rated output ±0.5 or 1% of set value, the maximum value shall prevail control guarantee range rated power value 1 to 100% rated power value 10 to 100 cooling method forced air cooling mass (Kg) 15 29 36 overall dimensions W×D×H ( mm ) 241 × 610 × 133 (excluding protrusions) 483 × 630 × 133 (excluding protrusions) remarks | Curve
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