Products
Scroll pump DIS-90
The DIS series scroll pump is a double-wound scroll pump with 1 orbital screw and 2 fixed screws. Can be operated under atmospheric pressure, can achieve high limit vacuum, low vibration and low noise, maintenance cycle can be controlled by the chronograph. Mainly used in analysis equipment, coating equipment, helium leak detector, semiconductor manufacturing process and other fields.
Classification:
scroll dry pump
Vacuum pump
Dry vacuum pump
scroll type dry pump
Key words:
scroll dry pump
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, compact structure, large displacement;
2, double-wound scroll pump, including 1 orbital screw and 2 fixed screws;
3, dry vacuum pump The highest pressure level;
4, built-in automatic reset thermal protector and other safety designs;
5. Inhibition of moisture condensation by air flushing.
| Usage1, Analysis Equipment;
2, gas recovery system;
3, coating equipment;
4, TMP back pump;
5, helium leak detector;
6, semiconductor manufacturing process.
-
| Specification
Type DIS90 DIS252 DIS501 DISL102 DISL503 Exhaust Speed m 3 /h 50hz 5.4 12.0 30.0 6.0 26.0 60hz 6.5 14.4 36.0 7.2 31.0 limit pressure Pa 5.0 1.6 1.0 20.0 30.0 motor voltage V single phase, 100/115/200/230V single phase: 100V/115V/200V/230V; Three phases: 200V/208V/230V/380V/400V/415V/460V single phase: 100/115/200/230V; Three phases: 200/208/230/380/400/415/460V single phase, 100/115/200/230V 50hz:3 phase, 200/380/400/415V;60hz:3 phase, 200/220/230/460V rated power kW 150 400 600 300 50hz 900W / 60hz 1100W cooling water L/min gas purge SLM noise value dB(A) ≦ 52 ≦ 70 Inlet KF-25 KF-25 KF-40 KF-25 KF-25 Exhaust KF-16 KF-16 KF-25 KF-16 KF-25 weight kg 14.0 25.0 44.0 17.0 34.0 size mm 214(W) × 308(L) × 225(H) 264(W) × 397(L) × 338(H) three phases: 292(W) × 372(L) × 397(H) 221(W) × 380(L) × 218(H) 317(W) × 521(L) × 280(H) remarks | exhaust curve
Related Products
