Products
Scroll pump DISL-503
The DISL503 scroll pump has a single-wound scroll pump with an orbital spiral and a fixed spiral. Than DIS series of dust and water vapor processing capacity, suitable for industrial use.
Classification:
scroll dry pump
Vacuum pump
Dry vacuum pump
scroll type dry pump
Key words:
scroll dry pump
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- Product features and uses
- Product parameters and graphs
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| Features
1, compact structure, large displacement;
2, double-wound scroll pump, including 1 orbital screw and 2 fixed screws;
3, dry vacuum pump The highest pressure level;
4, built-in automatic reset thermal protector and other safety designs;
5. Inhibition of moisture condensation by air flushing.
| Usage1, Analysis Equipment;
2, gas recovery system;
3, coating equipment;
4, TMP back pump;
5, helium leak detector;
6, semiconductor manufacturing process.
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| Specification
Type DIS90 DIS252 DIS501 DISL102 DISL503 Exhaust Speed m 3 /h 50hz 5.4 12.0 30.0 6.0 26.0 60hz 6.5 14.4 36.0 7.2 31.0 limit pressure Pa 5.0 1.6 1.0 20.0 30.0 motor voltage V single phase, 100/115/200/230V single phase: 100V/115V/200V/230V; Three phases: 200V/208V/230V/380V/400V/415V/460V single phase: 100/115/200/230V; Three phases: 200/208/230/380/400/415/460V single phase, 100/115/200/230V 50hz:3 phase, 200/380/400/415V;60hz:3 phase, 200/220/230/460V rated power kW 150 400 600 300 50hz 900W / 60hz 1100W cooling water L/min gas purge SLM noise value dB(A) ≦ 52 ≦ 70 Inlet KF-25 KF-25 KF-40 KF-25 KF-25 Exhaust KF-16 KF-16 KF-25 KF-16 KF-25 weight kg 14.0 25.0 44.0 17.0 34.0 size mm 214(W) × 308(L) × 225(H) 264(W) × 397(L) × 338(H) three phases: 292(W) × 372(L) × 397(H) 221(W) × 380(L) × 218(H) 317(W) × 521(L) × 280(H) remarks | exhaust curve
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