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Diaphragm dry pump DAU-20
DAU diaphragm pump has the advantages of high vacuum diaphragm pump and low vibration. It is mainly used in vacuum chuck, wafer, cutting-edge processing equipment, medical term and other fields.
Classification:
Aico
diaphragm type dry pump
DAU/DTU
Key words:
Aico
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- Product features and uses
- Product parameters and graphs
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| Features
1, low price, high sales volume standard dry vacuum pump;
2, dry vacuum pump that does not use oil in the gas contact area;
3, rich product lineup Can meet different application requirements;
4, two-stage exhaust system has lower pressure (good vacuum) than single-stage exhaust system;
5, built-in automatic reset type thermal protector and other safety design
6, atmospheric pressure can be operated; Simple structure, easy maintenance.
| Uses1, vacuum chuck, wafer and cutting-edge processing equipment;
2, vacuum tweezers, medical equipment;
3, printing equipment;
4, automatic packaging machine;
5, optical appliances, semiconductor industry, injection molding machine, etc.
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| specification parameter
type DAU-20 DTU-20 exhaust velocity m 3 /h 50hz 1.2 1.2 60hz 1.4 1.4 Ultimate Pressure Pa 200.0 200.0 Motor Voltage V Single Phase 100V Single Phase 100V rated power kW 0.08 0.08 cooling water quantity L/min gas purge SLM Noise Value dB(A) Inlet mm Rc 1/8 Rc 1/8 Exhaust mm Rc 1/8 Rc 1/8 Weight kg 7.5 7.5 Size mm 161(W)× 327(L)× 217(H) 161(W)× 327(L) X 217(H) Remarks | Exhaust Curve
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