Products
UTM1200A of magnetic levitation turbomolecular pump
The integrated type of magnetic levitation controller is adopted, and the advantages of saving wiring and space are realized through the integration of pump body and controller. Turbo molecular pump is mainly used in semiconductor, film and other industrial fields.
Classification:
Controller integrated type
magnetic suspension turbine floating molecular pump
Key words:
Controller integrated type
Contact Us
- Product features and uses
- Product parameters and graphs
-
| Features
1, Integrated Molecular Pump with Magnetic Levitation Controller; Through the integration of the body of the pump body and the controller, wiring and space saving are realized.
2, introduce the type of exhaust speed 1000L/s-3000L/s;
3, there is no need to directly match the pump body and the controller with complicated wiring;
4, free installation direction, there is no restriction on installation direction, so the free expansion of device design;
5. The number of revolutions of the pump can be changed in the range of 25-100%, so the cavity pressure can be adjusted;
6. Wide-area high-flow design for Light process;
7. High durability and safety.| Useis mainly used in semiconductor, thin film and other industrial fields.
-
| Specification Parameters
UTM-1200A UTM-1600A UTM-2300A UTM-3400A Intake Port VG150 / ISO160F VG200-250 / ISO200-250F VG250 / ISO250F VG300-350 / ISO320F Exhaust port KF40 Exhaust velocity * 2, * 3(L/sec) N2 1030.0 1400.0 2100.0 3200.0 Ar 980.0 1330.0 2000.0 3100.0 H2 660.0 750.0 1380.0 2100.0 limit pressure (n2)pa 10 negative to the 7th power compression ratio N2 2 × 10 8 1 × 10 8 above 1 × 10 9 above He 7 × 10 3 5 × 10 3 1 × 10 5 H2 8 × 10 2 9 × 10 2 6 × 10 3 Cooling Mode Water Cooling noise (db) 57 60 mass (kg) 43 41 56 94 auxiliary pump exhaust speed (L/h) 36.00 above 90.00 above revolution number (rpm) 37200 33700 27600 start time within 8 minutes within 9 minutes within 16 minutes outside control remote interface D-sub25PIN, contact input output D-sub37PIN, contact input output serial interface dedicated circular interface, RS232C/RS485 D-sub9PIN,RS232C/RS485 controller form integrated with pump body (built-in and bottom) power supply single phase AC220-240V 10%(50/60Hz) output 0.75KVA 1.2KVA cooling water flow (L/min) 3-4 | curve
Related Products
